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【PDF】A global model for SF6 plasmas coupling reaction kinetics in

During the BOSCH [1] or gas chopping [2] or time multiplexed deep etching process [3] in micro-electro-mechanical systems (MEMS) fabrication, SF6 is

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Assessing ground water coupling and vertical exchange in a

von Rohden, C.; Ilmberger, J.; Boehrer, B., 2009: Assessing ground water coupling and vertical exchange in a meromictic mining lake with an SF6

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A suitable connection technology is essential for conducting the SF6 gas from one gas compartment to another without losses and in an efficient manner

【PDF】SF6 arc plasma: hydrodynamic and kinetic coupling study

Printed in the UK PII: S0022-3727(98)87965-5 Simulation of a decaying SF6 arc plasma: hydrodynamic and kinetic coupling study J-B Belhaouari, J-J

【PDF】A global model for SF6 plasmas coupling reaction kinetics in

During the BOSCH [1] or gas chopping [2] or time multiplexed deep etching process [3] in micro-electro-mechanical systems (MEMS) fabrication, SF6 is

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During the BOSCH [1] or gas chopping [2] or time multiplexed deep etching process [3] in micro-electro-mechanical systems (MEMS) fabrication, SF6 is

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Characteristics of attachment instabilities in SF6 inductively coupled plasmas are experimentally studied under different coupling intensities. Experimental r

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area of micro-electro-mechanical systems (MEMS) fabrication, where in combination with SF6 plasma is used for deep Si etching during the Bosch2 process

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【PDF】Assessing groundwater coupling and vertical exchange in a

SF6-tracer experiment ARTICLE in JOURNAL OF HYDROLOGY · JUNE 2009 Impact Heidelberg, Germany b UFZ – Helmholtz Centre for Environmental Research,

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